Nowadays, mobile consumer electronics devices integrate various wireless interfaces like WIFI, Bluetooth, GPRS and GPS. Various approaches exist to protect the wireless interfaces against ESD stress. In recent years, researchers have focused on so‐called 'co‐design' techniques to solve both functional and protection constraints together which requires both RF and ESD design skills. However many IC designers still prefer to work with 'plug‐n‐play' protection concepts where the ESD clamps exhibit low parasitic capacitance, low series resistance and low leakage. This paper presents measurement results of 3 different SCR based protection approaches that exhibit high Q‐factor and low and stable parasitic capacitance over a broad voltage and frequency range. The clamps are used for protection of LNA circuits in 90nm and 40nm Low Power (LP) CMOS technologies.
1. Conference paper SCR based on-chip ESD protection for LNA's in
90nm and 40nm CMOS
Taiwan ESD and Reliability Conference 2010
Nowadays, mobile consumer electronics devices integrate various wireless
interfaces like WIFI, Bluetooth, GPRS and GPS. Various approaches exist to
protect the wireless interfaces against ESD stress. In recent years,
researchers have focused on so‐called 'co‐design' techniques to solve both
functional and protection constraints together which requires both RF and
ESD design skills. However many IC designers still prefer to work with
'plug‐n‐play' protection concepts where the ESD clamps exhibit low
parasitic capacitance, low series resistance and low leakage. This paper
presents measurement results of 3 different SCR based protection
approaches that exhibit high Q‐factor and low and stable parasitic
capacitance over a broad voltage and frequency range. The clamps are
used for protection of LNA circuits in 90nm and 40nm Low Power (LP)
CMOS technologies.
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2. SCR based on-chip ESD protection
for LNA’s in 90nm and 40nm CMOS
B. Keppens, I. Backers, J. Binnemans*, B. Sorgeloos, O. Marichal, K. Verhaege
Sofics BVBA, Groendreef 31, B-9880 Aalter, Belgium – bkeppens@sofics.com
*now with ICSense - This paper is co-copyrighted by Sofics and Taiwan ESD and Reliability Conference.
Abstract – Nowadays, mobile consumer electronics devices integrate
various wireless interfaces like WIFI, Bluetooth, GPRS and GPS.
Various approaches exist to protect the wireless interfaces against
ESD stress. In recent years, researchers have focused on so-called
‘co-design’ techniques to solve both functional and protection
constraints together which requires both RF and ESD design skills.
However many IC designers still prefer to work with ‘plug-n-play’
protection concepts where the ESD clamps exhibit low parasitic
capacitance, low series resistance and low leakage. This paper
presents measurement results of 3 different SCR based protection
approaches that exhibit high Q-factor and low and stable parasitic
capacitance over a broad voltage and frequency range. The clamps
are used for protection of LNA circuits in 90nm and 40nm Low
Power (LP) CMOS technologies.
INTRODUCTION
The number of wireless enabled systems is very diverse and
steadily growing. System makers include wireless functions into
mature applications like fixed-line telephones and TV’s, increase
the wireless features in mobile phones with support of multiple
standards and come up with new device types that thrive on
being always wirelessly connected for the newest content [1].
Further, also the transport, security, medical and payment sectors
are quickly switching to wireless interfaces for improved user
experience. Intelligent wireless bus, subway and train tickets
replace the paper versions. Expensive equipment or resources in
general are traced back thanks to RFID tags. Sensor networks
reduce the cost of medical care while they increase the reaction
speed when needed. Near Field Communication ‘NFC’ bank
cards replace the smartcard and magnetic strips now commonly
used.
Wireless communication comes in many forms, each
designed or optimized for a specific task and application and
sometimes constrained by local legislations differences [2].
Moreover existing standards are typically upgraded a few years
down the road to enable higher data throughput or to extend the
range [3]. Wireless standards can be grouped or compared based
on different parameters like center frequency, primary use,
encoding protocol, degree of mobility or range for instance. A
rather complete overview of industry standards and proprietary
formats can be found online [4].
Despite the improved ESD awareness and control in
assembly factories and the related push for a reduction of
component level ESD performance [5, 6] IC’s still need
adequate ESD protection. In many cases, traditional ESD
protection devices used for low speed digital interfaces offered
by foundries, IO library providers are not suited for the RF
interfaces for a number of reasons:
- Capacitive loading shunts large part of the RF signal to
Vdd/Vss lines due to high parasitic junction and metal
capacitance of ESD clamps.
- Increased noise injected at the receiver due to series
resistance used between primary and secondary ESD clamps
- DC leakage current degrades Q-factor and influences the
size of the bias circuits
To reduce the cost of consumer electronics devices designers
also try to combine different standards into a single silicon die
[3] adding more constraints for the ESD protection approaches:
the clamp parasitic influence should be as stable as possible
across a large frequency band and voltage range.
This publication first (section I) briefly summarizes existing
approaches for ESD protection of RF interfaces like plug-n-play,
co-design and cancellation techniques. Section II describes a
plug-n-play SCR clamp validated for an 8.5 GHz LNA designed
in TSMC 90nm LP. Section III describes 2 different SCR based
protection devices validated in TSMC 40nm LP CMOS to be
used in a plug-n-play configuration. The most appropriate clamp
is selected based on TLP, HBM, RF / S-parameter and DC
leakage measurements at 3 temperatures.
In this publication we focus on Bluetooth, GPS and the IEEE
802.15.4a standard used for Real Time Location Systems
(RTLS) [7] but the ESD devices can be used more broadly
thanks to the low parasitic capacitance, high Q factor and low
leakage.
I. ESD APPROACHES FOR WIRELESS INTERFACES
IC designers use a variety of ESD protection approaches to
protect the integrated circuits against ESD stress. The well
known ‘dual diode’ based ESD protection has been used by
many designers for the protection of analog circuits thanks to the
small area, straightforward implementation, low leakage and low
capacitive loading. Recently however various researches have
predicted the end of ‘dual diode based ESD design’ for RF
circuits in advanced CMOS (65nm and beyond) due to the
shrinking ESD design window of the sensitive circuits [8-13].
They reason that to ensure effective protection the diodes
connected to the IO’s must be designed with larger perimeter to
reduce the voltage drop (Ron x IESD) which in turn leads to higher
leakage and higher capacitive loading worsening the RF
performance of the connected circuits.
3. Fortunately there are alternatives to protect RF circuits
against ESD stress. This section very briefly outlines different
protection approaches [11, 14] and provides relevant references:
(1) Plug-n-play, minimal parasitic capacitive loading
The parasitic capacitance of the ESD devices is minimized
such that the degradation of the RF performance is limited.
Researchers have compared different device types for this
purpose [15-17]. Besides the active ESD devices people have
used low frequency filters for high frequency applications
(>5GHz) [18-21]
(2) ‘LC’ Cancellation techniques
In various publications designers compensated the parasitic
effects of ESD devices by adding tuned LC elements [10, 13,
22]
(3) Co-design
Through the use of ‘co-design’ traditional ESD solutions
with high capacitive loading can still be used because the
negative effects are compensated for in the matching circuits
[23, 24].
The following sections provide case studies based on one
specific protection approach: plug-n-play protection with low
capacitive SCR based protection.
II. ESD FOR 8.5GHZ LNA IN 90NM LP
An SCR based protection clamp is validated for an 8.5 GHz
LNA designed in TSMC 90nm LP. The ESD protection is
designed to protect the ultra-wideband RF circuits based on the
IEEE 802.15.4a standard [7]. 802.15.4a is an alternate PHY and
adds location awareness, low power and higher data rates to the
PHY and MAC specification for Zigbee devices. The circuit can
be used for accurate real-time indoor location of resources/assets
and in wireless sensors for health, retail, manufacturing and
security sectors. One of the key requirements is the low leakage
core and IO circuits: The chip operates off a single watch battery
for up to 10 years.
The proprietary circuit to be protected consists of 3.3V
transistors leading to a failure voltage (ESD design window) of
11.4V enabling various ESD protection concepts. To leave room
for a large analog circuit including coils on the top metal, the IO
ring is designed such that there is only a low resistive Vss bus
available at the RF interfaces which means that a ‘dual diode’
protection approach is not feasible. To enable the high frequency
signals the parasitic junction capacitance of ESD clamps has to
be below 100fF. Furthermore the clamp leakage at room
temperature must be below 1nA.
The selected protection design consists of an SCR clamp
triggered by a NMOS device [25, 27] with dynamic gate bias as
shown in figure 1 (top). The layout (figure 1 bottom) includes
the SCR clamp, NMOS trigger, RC ESD detection filter, reverse
diode and all required guard bands within an area of 55.91um by
52.08um. Thanks to this small area the ESD cell could be
located under the bond pad (Circuit under Pad - CUP) leaving
room for the large area inductors of the RF circuit. Besides the
IO pad and a low resistive metal connection to Vss, a narrow
connection to Vdd is required to keep the capacitance of the RC
detection circuit charged up during functional operation of the
circuit and to keep the diode from pad to anode reverse biased.
Figure 1: Schematic and layout view of the MOS triggered SCR
protection clamp. The total silicon footprint is less than 3000um²
and could easily fit under the bond pad.
The parasitic capacitance loading of the ESD clamp is
calculated based on available models from the foundry following
the equivalent circuit consisting of 9 junction capacitances and 7
metal capacitance values (figure 2). Total IO capacitance is less
than 100fF.
Figure 2: Equivalent circuit for the calculation of parasitic junction
and metal capacitance. Total capacitance at the IO’s is 98.62fF.
The ESD design guarantees effective ESD protection up to
2kV HBM, well above the standard requirement used for RF
interfaces in advanced CMOS technology. This means that the
chip can be handled in low cost assembly houses to push down
the cost of the system.
Thanks to the low capacitive loading of 98.62fF and low
leakage below 0.1 nA (@ 25°C), 55nA (@ 125°C) the clamp
does not influence the RF behavior thereby greatly simplifying
the design of the RF circuits. RF data will be available at the
presentation of the publication.
4. III. SCR BASED RF PROTECTION IN 40NM LP
This section outlines various SCR based approaches for ESD
protection of wireless interfaces in a 40nm Low Power CMOS
technology. First the different device types and measurement
setups are described followed by the measurement results.
Finally the most appropriate ESD protection device is selected
based on the TLP, HBM, RF / S-parameter and DC leakage
measurements.
III.A. DEVICE TYPES
Two different SCR based protection clamps are compared for
1.1 (1.2V overdrive) RF interfaces. The variation between the
clamps is mainly related to the trigger concept. Figure 3 provides
an overview of the two clamp devices including a top view of
the layout.
- The ESD-on-SCR is triggered as soon as the IO level raises
1 diode drop (Anode-G2) above the Vdd voltage [26].
- The DTSCR is turned on once the Anode-G2 and 3 trigger
diodes are forward biased [27, 28].
Besides these two main types some other variations were
combined on an RF TEG test chip to validate SCR based
protection for LNA circuits.
All SCR clamps are designed for 2kV HBM and 200V MM
which corresponds to more than 2A of TLP current in the TSMC
40nm process technology. The SCR perimeter of 2x47um is the
same for all devices. All use 4 layers of metal leaving all other
layers for bus routing. To limit noise coupling all devices
described here use the deep Nwell layer.
Each clamp type is connected to Ground-Signal-Ground pads
to obtain accurate capacitance and Q-factor values. De-embedding
structures (short, open) are available too (Figure 4).
ESD devices are available as stand-alone clamps (for
accurate leakage tests) and with 2 different monitor structures to
characterize the effectiveness of the ESD protection: (1) The
‘GOX’ monitor [25] is a minimum size, fully silicided thin oxide
transistor with gate connected to the IO pad. (2) The ‘RC-MOS’
monitor is a minimum size, fully silicided thin oxide transistor
where drain is connected to pad, source to ground and gate is
biased at 1/3 of the drain voltage through an RC-filter scheme.
Figure 4: 40nm RF test chip overview (left) and GSG layout
example for a single clamp cell (right). The S-parameters are de-embedded
to the edge of the ESD-clamps. An individual OPEN
and SHORT structure is provided for each clamp.
Figure 3: Overview of the 2 SCR based ESD clamps used in this work. The schematics are depicted on the top, left. The ESD-on-SCR
is triggered as soon as the IO level raises 1 diode drop (Anode-G2) above the Vdd voltage. The DTSCR is turned on once the Anode-
G2 and trigger diodes are forward biased. Layout comparison of the clamps is shown top, right: Due to the trigger diodes, the DTSCR
clamp (1286um²) is twice the size as the ESD-on-SCR clamp (622um²). While the trigger condition of the ESD-on-SCR is partly
determined by power clamp device the silicon area of the power clamp is not included in this area comparison because the power
clamp device is required anyway. Measurement results are summarized in the table.
5. III.B. MEASUREMENT SETUPS AND RESULTS
The different SCR clamps and monitor structures are
measured with Transmission Line Pulse (TLP), HBM, MM, DC
leakage and S-parameter systems.
The TLP data is performed with a Barth Electronics (10ns
rise time, 100ns pulse width). For all devices positive stress is
applied to the IO pad while the local ground (LGND) is
grounded. During TLP stress relay S1 is open (Figure 5) but in
order to obtain accurate leakage current results the substrate
needs to be grounded through the global ground pad (GGND) by
closing relay S1 during the leakage test. For some devices, a
diode is present from IO to VDD. This results in an additional
leakage path through the diode from IO to VDD and through the
power clamp to LGND/GGND. The leakage current for these
configurations is still low enough to detect failure if the VDD
pad is left floating. Therefore the VDD pad is not powered
during the leakage test. The maximum current level ‘Imax’ is
defined as It2 failure current minus a 20% safety margin.
Figure 5: TLP measurement setup: During TLP pulsing between
IO and ground the global ground ‘GGND’ is not connected. For
leakage measurements in between ‘zaps’ the global ground (and
complete substrate) is connected together with the local ground
‘LGND’. Vdd remains floating during the TLP/leakage tests.
Figure 6: TLP IV curves for the 2 device types: The clamping
behavior is identical. For the ESD-on-SCR the Vdd pad is biased
at 1.1V during the leakage measurement.
Figure 6 and 7 plot the TLP IV curves of the 2 devices. The
clamping device (SCR) is the same in the 2 device types also
evident from the figures: the clamping behavior is exactly the
same. The failure current It2 is more than 2.5A. After subtracting
a safety margin of about 20% to cover process variations the
maximum current level (‘Imax’) is more than 2A for all devices.
As expected, the triggering of the ESD-on-SCR is strongly
different compared to the DTSCR and makes it more effective
for protection of sensitive circuits.
Figure 7: Zoom-in on the TLP IV curves for the 2 device types:
The trigger voltage of the ESD-on-SCR is much lower than the
DTSCR.
Besides standard TLP tests each clamp is also stressed with
multiple pulses according to the same test setup. At least 1000
TLP pulses are applied with current amplitude fixed to the
maximum current level ‘Imax’ [25, 29]. The leakage current is
measured after each set of 100 pulses. Failure is defined as any
significant or systematic deviation from the pre-stress leakage
current. All devices passed this test condition without leakage
increase.
Figure 8: Measurement setup for HBM/MM measurements. VDD
and GGND are only connected during the curve trace phase by
closing switch S1 and S2
HBM, MM measurements are applied to the IO pin with all
LGND pins grounded and with VDD and GGND floating. The
DC sweep between zaps is performed while both GND and
LGND pads are grounded and 1.32V bias is applied to the VDD
pad. Figure 8 illustrates the measurement setup used for the
HBM and MM tests. Minimum pass level for HBM and MM
measurements is given in the table in figure 3, based on data of 6
samples (3 with ‘GOX’ monitor and 3 with ‘RC-MOS’ monitor).
6. Figure 10: S-parameter analysis at 5GHz- average of 4 dies.
Influence of the total IO capacitance versus IO voltage: Both
devices show a rather small variation in parasitic capacitance.
During DC leakage measurements both global and local
ground pads are connected and grounded. The supply pad
(VDD) is biased at 1.32V DC. The voltage at the IO pad is swept
linearly from 0V to 1.32V. The measurements are performed on
devices without a monitor device to accurately measure the
clamp leakage. The measurements are performed on die, in the
dark and at three temperatures: room temperature (25°C), 85°C
and 120°C. Figure 9 summarizes the data for the two device
types. The measurements on the ESD-on-SCR show that the
intrinsic leakage of the SCR device is very low even in 40nm
CMOS (~10pA). The leakage of the DTSCR is determined by
the trigger element: the leakage stays below 100pA when a
diode chain is used to trigger the SCR. The leakage current has a
strong relation to the Q-factor of the ESD clamps: The table in
figure 3 shows that the Q-factor of the ESD-on-SCR (lowest
leakage) is 1.5 times higher than that of the DTSCR where the
leakage is 10 times higher.
Finally, the different clamps were measured with RF S-parameter
equipment. After de-embedding based on ‘open’ and
‘short’ structures, the device parasitic capacitance (junction and
metal combined) is determined as a function of IO bias voltage
(between 0 and 1V) and frequency (between 1 and 20 GHz).
Both plots (Figures 10 and 11) show that the capacitance level
variation is less than 6%.
Figure 11: S-parameter analysis at 0V IO bias, average of 4 dies:
Influence of the total IO capacitance versus signal frequency:
Both device types have a small variation in capacitance value.
Figure 9: Comparison of the DC leakage measurements at three temperatures (25°C, 85°C and 120°C) betwe en the two SCR types
in this study. To measure the clamp related leakage individually all test structures were measured without monitor devices. The basic
SCR in 40nm has an extremely low leakage (~10pA) that is very stable across temperature. This is visible in the leakage
measurements on the ESD-on-SCR device (Vdd is biased at 1.2V). The leakage current for DTSCR is determined by the trigger
element. The leakage difference can be used to select the clamp with the highest Q-factor: The ESD-on-SCR has the lowest leakage
and the highest Q-factor.
7. Besides the standard devices described above additional
variations are included on the test chip including capacitance
reduction circuits, SCR anode/de/cathode layout variations and
versions without deep Nwell. A summary of the ESD, Q
and capacitance values is given in figure 12.
Q-factor
Figure 12: : Various layout variations were available on the RF test
chip. High ESD performance combined with low le
leakage, high Q-factor
factor and low parasitic capacitance loading can be easily
achieved in 40nm.
III.C. SELECTION OF THE MOST APPROPRIATE ESD
CLAMP
Based on the different measurements the recommended
protection solution for LNA circuits in 40nm is the ESD
ESD-on-
SCR. While the parasitic capacitance is similar between DTSCR
and ESD-on-SCR devices, the latter has much lower l
leakage
current, higher Q-factor and a much smaller silicon footprint.
The ESD data shows that the ESD-on-SCR provides an effective
protection of more than 300V MM and 5.2kV HBM. However,
in many cases the required protection level is only 2kV HBM.
Thanks to the simple layout style and st
straightforward
metallization concept the ESD-on-SCR can be easily scaled
down to lower the ESD performance leading to further reduced
leakage (below 10pA), capacitance (~100fF) and silicon area
(~500um²).
Important to note is that the ESD-on-SCR is trigger
triggered into
low voltage clamping mode as soon as the IO voltage raises
0.7V above the Vdd potential (1.2V). For the LNA circuits
described here this is not a concern: The applied signal has no
DC component. Also, the he bias circuit has a high output
resistance and the bias level is somewhere between
0.3V and
0.5V much lower than the SCR holding voltage.
Moreover, the
input signal from the antenna has a low amplitude
which means
that the trigger condition for the ESD-on-SCR is never fulfilled.
For the protection of f other applications in advanced CMOS the
SCR can easily be tweaked to solve most latch
latch-up constraints
including transient latch-up situations during system level stress
[30, 31].
If the Vdd line is rather noisy it could couple to the RF IO
pad. Therefore, some designers may prefer the DTSCR device
type because it has much less parasitic capacitance between IO
and Vdd.
IV. DISCUSSION
, CDM is a major concern but because it can only be measured
in final products we have confirmed the voltage response of the
clamps with TLP pulses with fast rise time of 200ps.
CONCLUSION
ONCLUSION
This publication provided information about SCR based ESD
protection clamps for RF circuits validated in TSMC 90nm and
TSMC 40nm LP CMOS technologies.
In both technologies the
ESD protection clamps described have excellent
merit: Due to the low parasitic capacitance, low leakage and
high Q-factor the influence on the RF performance is limited
designers can rely on these SCR device types without the need
for extensive co-design optimizations
circuitry and ESD protection devices.
The paper provided measurement results on
LNA’s where the sensitive thin oxide
protected up to 5.2kV HBM while the leakage
and the parasitic capacitance is around 180fF over a broad range
of frequency and voltage.
While this paper focused on Bluetooth, GPS and the IEEE
802.15.4a standard the ESD device
broadly for both high frequency RF IO’s as well as high speed
differential, digital interfaces like HDMI and USB 3.0
NOTE
As is the case with many published ESD design solutions, the
techniques and protection solutions described in this paper are
covered under patents and cannot be copied freely.
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